List of records in nano database
IDs:
376
| Authors : |
Nagy,N.;Pap,A.,E.;Horváth,E.;Volk,J.;Bársony,I.;Deák,A.;Hórvölgyi,Z. |
| Title : |
Large area self-assembled masking for photonic applications |
| JournalName : |
Applied Physics Letters |
| PubDateYear : |
2006 |
| PubDateOther : |
|
| Volume : |
89 |
| Issue : |
|
| StartPage : |
063104-1 |
| EndPage : |
063104-3 |
| Keywords : |
|
| Notes : |
|
| Abstract : |
Ordered porous structures for photonic application were fabricated on p- and n-type silicon by
means of masking against ion implantation with Langmuir-Blodgett LB films. LB films from
Stöber silica spheres J. Colloid Interface Sci. 26, 62 1968 of 350 nm diameter were applied in
the boron and phosphorus ion-implantation step, thereby offering a laterally periodic doping pattern.
Ordered porous silicon structures were obtained after performing an anodic etch and were then
removed by alkaline etching resulting in the required two-dimensional photonic arrangement. The
LB silica masks and the resulting silicon structures were studied by field emission scanning electron
microscope analysis. |
| HTML_Local : |
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| HTML_Remote : |
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| Preprint_Local : |
http://www.nanotechnology.hu/reprint/apl_89_063104_Nagy.pdf |
| Preprint_Remote : |
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